JPH0624839Y2 - ペリクル収納容器 - Google Patents
ペリクル収納容器Info
- Publication number
- JPH0624839Y2 JPH0624839Y2 JP1988070544U JP7054488U JPH0624839Y2 JP H0624839 Y2 JPH0624839 Y2 JP H0624839Y2 JP 1988070544 U JP1988070544 U JP 1988070544U JP 7054488 U JP7054488 U JP 7054488U JP H0624839 Y2 JPH0624839 Y2 JP H0624839Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- support frame
- flexible sheet
- adhesive
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003860 storage Methods 0.000 title claims description 34
- 239000000853 adhesive Substances 0.000 claims description 18
- 230000001070 adhesive effect Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 description 6
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- -1 polypropylene, ethylene-vinyl acetate Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988070544U JPH0624839Y2 (ja) | 1988-05-28 | 1988-05-28 | ペリクル収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988070544U JPH0624839Y2 (ja) | 1988-05-28 | 1988-05-28 | ペリクル収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173744U JPH01173744U (en]) | 1989-12-11 |
| JPH0624839Y2 true JPH0624839Y2 (ja) | 1994-06-29 |
Family
ID=31295780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988070544U Expired - Lifetime JPH0624839Y2 (ja) | 1988-05-28 | 1988-05-28 | ペリクル収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624839Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4963041B2 (ja) * | 2006-06-16 | 2012-06-27 | 旭化成イーマテリアルズ株式会社 | ペリクル収納容器 |
| JP5684743B2 (ja) * | 2012-01-16 | 2015-03-18 | 信越化学工業株式会社 | ペリクル収納容器及びペリクル保管方法 |
-
1988
- 1988-05-28 JP JP1988070544U patent/JPH0624839Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01173744U (en]) | 1989-12-11 |
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